Integrated Micro-systems

Contact: Reinoud Wolffenbuttel

Research fields:

  • Optical micro-systems
    - Microspectrometers: UV, visible and Infrared
  • Mechanical micro-systems
    - Gas density and viscosity sensors
  • Gas thermal conductivity sensors
  • On-chip Metrology

Projects under this theme

MSc students

  • Yaonian Cui
  • Guanchu Wang
  • Bo Jiang